Effects of hydrogen ion implantation on Al/Si Schottky diodes
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.97821
Reference17 articles.
1. Neutralization of acceptors in silicon by atomic hydrogen
2. Mechanism for hydrogen compensation of shallow-acceptor impurities in single-crystal silicon
3. Deactivation of the boron acceptor in silicon by hydrogen
4. Interstitial hydrogen and neutralization of shallow-donor impurities in single-crystal silicon
5. Hydrogen passivation of point defects in silicon
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