Principles and applications of elastic scattering with high‐energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures

Author:

Müller P.,Ischenko G.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Stability of semiconducting gallium oxide thin films;Thin Solid Films;1990-09

2. Solid state amorphisation reaction in sputtered and evaporated Ni/Zr multilayer films;Journal of Physics: Condensed Matter;1990-04-09

3. Rutherford backscattering studies of surface density reduction in ion-implanted and excimer-laser-annealed Ge;Journal of Physics and Chemistry of Solids;1987-01

4. Applications of Heavy-Ion Rutherford Backscattering Spectrometry (HIRBS) to the analysis of contact structures on GaAs and Ge;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-05

5. A comparative study of methods for thin-film and surface analysis;Reports on Progress in Physics;1984-03-01

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