General model and segregation coefficient measurement for ultrashallow doping by excimer laser annealing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1927275
Reference27 articles.
1. Photonic high-frequency capacitance-voltage characterization of interface states in metal-oxide-semiconductor capacitors
2. Nanotechnology goals and challenges for electronic applications
3. Boron uphill diffusion during ultrashallow junction formation
4. Boron Profile Narrowing in Laser-Processed Silicon after Rapid Thermal Anneal
5. Transient enhanced diffusion after laser thermal processing of ion implanted silicon
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Defect reduction and dopant activation of in situ phosphorus-doped silicon on a (111) silicon substrate using nanosecond laser annealing;Applied Physics Express;2021-01-12
2. Ultrafast molecular dynamics of biofuel extraction for microalgae and bacteria milking: blocking membrane folding pathways to damaged lipid-bilayer conformations with nanomicelles;Journal of Biomolecular Structure and Dynamics;2014-04-15
3. Ultralow Thermal Conductivity Minimum in Silicon Supercrystals with Weakly and Strongly Bonded Germanium Nanodots for Thermoelectrics;ACS Sustainable Chemistry & Engineering;2013-04-04
4. Marked Thermal Exaltation in Hybrid Thin Membranous Nanomaterials Covered by Stretched Nanodots for Thermoelectrics and Passive Cooling;ACS Applied Materials & Interfaces;2010-11-24
5. Alternating Reversed Scanning Sequence for Improved Within-Wafer Uniformity During Nonmelt Laser Annealing of Arsenic-Implanted Silicon;IEEE Transactions on Semiconductor Manufacturing;2010-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3