Nanopore fabricated in pyramidal HfO2 film by dielectric breakdown method
Author:
Affiliation:
1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China
2. School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China
Funder
National Natural Science Foundation of China (NSFC)
Natural Science Foundation of Beijing Municipality (Beijing Natural Science Foundation)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4990717
Reference28 articles.
1. Continuous base identification for single-molecule nanopore DNA sequencing
2. Highly Sensitive, Mechanically Stable Nanopore Sensors for DNA Analysis
3. DNA Translocation through Graphene Nanopores
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5. High-Bandwidth Protein Analysis Using Solid-State Nanopores
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