Fabrication of solid-state nanopores

Author:

Lin KabinORCID,Chen ChenORCID,Wang Congsi,Lian Peiyuan,Wang Yan,Xue Song,Sha Jingjie,Chen YunfeiORCID

Abstract

Abstract Nanopores are valuable single-molecule sensing tools that have been widely applied to the detection of DNA, RNA, proteins, viruses, glycans, etc. The prominent sensing platform is helping to improve our health-related quality of life and accelerate the rapid realization of precision medicine. Solid-state nanopores have made rapid progress in the past decades due to their flexible size, structure and compatibility with semiconductor fabrication processes. With the development of semiconductor fabrication techniques, materials science and surface chemistry, nanopore preparation and modification technologies have made great breakthroughs. To date, various solid-state nanopore materials, processing technologies, and modification methods are available to us. In the review, we outline the recent advances in nanopores fabrication and analyze the virtues and limitations of various membrane materials and nanopores drilling techniques.

Funder

Youth Innovation Team of Shaanxi Universities

National Natural Science Foundation of China

Natural Science Basic Research Program of Shaanxi

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

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