Direct writing of silicon gratings with highly coherent ultraviolet laser
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120447
Reference8 articles.
1. Continuously chirped DFB gratings by specially bent waveguides for tunable lasers
2. Cascade self-induced holography: a new grating fabrication technology for DFB/DBR lasers and WDM laser arrays
3. Effect of sidelobes on demultiplexing characteristics of a grating-folded directional coupler demultiplexer
4. Narrow spectral bandwidths with grating waveguide structures
5. Optical monitoring for plasma-etching depth process
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