Study of structural and electrical properties of ferroelectric HZO films obtained by single-target sputtering-Reference-Cited by-同舟云学术

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Study of structural and electrical properties of ferroelectric HZO films obtained by single-target sputtering

Published:2021-08-01 Issue:8 Volume:11 Page:085004
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Hachemi M. B.¹²^ORCID,Salem B.¹^ORCID,Consonni V.³^ORCID,Roussel H.³^ORCID,Garraud A.¹^ORCID,Lefevre G.¹^ORCID,Labau S.¹,Basrour S.²^ORCID,Bsiesy A.¹

Affiliation:

1. University Grenoble Alpes, CNRS, CEA/LETI-Minatec, Grenoble INP, LTM, 38054 Grenoble, France

2. University Grenoble Alpes, CNRS, Grenoble INP, TIMA, 38000 Grenoble, France

3. University Grenoble Alpes, CNRS, Grenoble INP, LMGP, 38000 Grenoble, France

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0058656

Reference40 articles.

1. Ferroelectric properties of Pb(Zr,Ti)O3 thin films until 40 GHz

2. Piezoelectric MEMS sensors: state-of-the-art and perspectives

3. Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications

4. Coexistence of excellent piezoelectric performance and high Curie temperature in KNN-based lead-free piezoelectric ceramics

5. LiNbO3 films – A low-cost alternative lead-free piezoelectric material for vibrational energy harvesters

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1. Impact of Hysteresis Curve on Subthreshold Swing in Ferroelectric FET;Vietnam Journal of Science and Technology;2024-02-23

2. Improving the Synaptic Behavior with Polar Orthorhombic Phase in Hf_0.5Zr_0.5O₂ Film;ACS Applied Electronic Materials;2023-08-10

3. Roadmap on ferroelectric hafnia- and zirconia-based materials and devices;APL Materials;2023-08-01

4. Effects of Charge Trapping on Memory Characteristics for HfO2-Based Ferroelectric Field Effect Transistors;Nanomaterials;2023-02-06

5. Sputtered HfO2/ZrO2 Induced Interfacial Ferroelectric HZO Layer for Negative Capacitance Applications;Lecture Notes in Electrical Engineering;2023

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