Electrical characterization of metal/AlN/Si thin film hydrogen sensors with Pd and Al gates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1563312
Reference12 articles.
1. A hydrogen−sensitive MOS field−effect transistor
2. A hydrogen‐sensitive Pd‐gate MOS transistor
3. Hydrogen sensitivity of palladium–thin-oxide–silicon Schottky barriers
4. Hydrogen adsorption states at the external and internal palladium surfaces of a palladium‐silicon dioxide‐silicon structure
5. Physics with catalytic metal gate chemical sensors
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