Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373036
Reference16 articles.
1. Review of inductively coupled plasmas for plasma processing
2. The electron-energy distribution function in a shielded argon radiofrequency inductive discharge
3. Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study
4. Electron‐density and energy distributions in a planar inductively coupled discharge
5. Two-dimensional fluid model of high density inductively coupled plasma sources
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