The electron-energy distribution function in a shielded argon radiofrequency inductive discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference14 articles.
1. Electrical characteristics of parallel-plate RF discharges in argon
2. Measurement of electron energy distribution in low-pressure RF discharges
3. In situ simultaneous radio frequency discharge power measurements
4. Probe measurements of the space potential in a radio frequency discharge
5. A simple analysis of an inductive RF discharge
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