Thermal crystallization of amorphous Si/SiO2 superlattices
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123914
Reference7 articles.
1. Nanocrystalline Silicon for Optoelectronic Applications
2. Nanocrystalline-silicon superlattice produced by controlled recrystallization
3. Nanocrystalline silicon superlattices: fabrication and characterization
4. Crystallization kinetics of amorphous Si/SiO2 superlattice structures
5. Crystallization and diffusion in progressively annealeda‐Ge/SiOxsuperlattices
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