Suppression of suprathermal ions from a colloidal microjet target containing SnO2 nanoparticles by using double laser pulses
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2799175
Reference18 articles.
1. Extreme ultraviolet lithography
2. EUV Source Workshop;Miyake A.,2006
3. Laser-produced-plasma light source development for extreme ultraviolet lithography
4. Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams
5. Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas
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2. Angular distribution separation of the extreme ultraviolet emission and suprathermal ions with energy reduction;Applied Physics Letters;2024-01-29
3. Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source;Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology;2023-09-29
4. Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source;Applied Physics Express;2020-10-15
5. Controlling ion kinetic energy distributions in laser produced plasma sources by means of a picosecond pulse pair;Journal of Applied Physics;2018-08-07
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