Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3364141
Reference15 articles.
1. Optimizing 13.5nm laser-produced tin plasma emission as a function of laser wavelength
2. Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas
3. Influence of spot size on extreme ultraviolet efficiency of laser-produced Sn plasmas
4. Effects of plasma spatial profile on conversion efficiency of laser-produced plasma sources for EUV lithography
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