Influence of spot size on extreme ultraviolet efficiency of laser-produced Sn plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3270526
Reference12 articles.
1. EUV Sources for Lithography
2. Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets
3. Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source
4. Extreme ultraviolet source using a forced recombination process in lithium plasma generated by a pulsed laser
5. Efficient extreme ultraviolet plasma source generated by a CO2 laser and a liquid xenon microjet target
Cited by 58 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Laser-induced breakdown spectroscopy as a method for millimeter-scale inspection of surface flatness;Plasma Science and Technology;2024-09-01
2. Study of spectral intensity of the laser ablated tungsten plasma and ablation mass at various laser spot sizes and laser fluence in vacuum environment;Spectrochimica Acta Part B: Atomic Spectroscopy;2023-01
3. Radiation of extreme ultraviolet source and out-of-band from laser-irradiated low-density SnO<sub>2</sub> target;Acta Physica Sinica;2023
4. Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review);Journal of Optics;2022-04-22
5. Role of Focusing Distance in Picosecond Laser-Induced Cu Plasma Spectra;Advances in High Energy Physics;2022-01-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3