Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2426883
Reference31 articles.
1. Extreme ultraviolet lithography: overview and development status
2. Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams
3. Erosion and degradation of EUV lithography collector mirrors under particle bombardment
4. Plasma Expansion into a Vacuum
5. Collisionless expansion of a Gaussian plasma into a vacuum
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