Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas-Reference-Cited by-同舟云学术

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Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas

Published:2016-06 Issue:6 Volume:23 Page:063514
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Wilczek Sebastian¹,Trieschmann Jan¹,Eremin Denis¹,Brinkmann Ralf Peter¹,Schulze Julian¹²,Schuengel Edmund²,Derzsi Aranka³,Korolov Ihor³^ORCID,Hartmann Peter³^ORCID,Donkó Zoltán³,Mussenbrock Thomas¹

Affiliation:

1. Department of Electrical Engineering and Information Science, Ruhr University Bochum, Bochum, Germany

2. Department of Physics, West Virginia University, Morgantown, West Virginia 26506, USA

3. Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Konkoly Thege Miklós str. 29-33, 1121 Budapest, Hungary

Funder

Deutsche Forschungsgemeinschaft (DFG)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4953432

Reference51 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. Multiple frequency capacitively coupled plasmas as a new technology for sputter processes

4. The 2012 Plasma Roadmap

5. Transition between different regimes of rf glow discharges

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