Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO polycrystalline films-Reference-Cited by-同舟云学术

Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO polycrystalline films

Published:2018-08-14 Issue:6 Volume:124 Page:065304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Nomoto Junichi¹,Makino Hisao¹^ORCID,Inaba Katsuhiko²,Kobayashi Shintaro²,Yamamoto Tetsuya¹

Affiliation:

1. Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami, Kochi 782-8502, Japan

2. X-Ray Research Laboratory, Rigaku Corporation, 3-9-12 Matsubara, Akishima, Tokyo 196-8666, Japan

Funder

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5038162

Reference59 articles.

1. K. Kushiya , S. Kuriyama , I. Hara , Y. Nagoya , M. Tachiyuki , and Y. Fujiwara , in Proceedings of 29th IEEE Photovoltaic Specialists Conference ( Institute of Electrical and Electronics Engineers, New Orleans, LA, 2002), p. 579.

2. Ga-doped zinc oxide: An attractive potential substitute for ITO, large-area coating, and control of electrical and optical properties on glass and polymer substrates

3. Development of Ga-doped ZnO transparent electrodes for liquid crystal display panels

4. High rate planar magnetron deposition of transparent, conducting, and heat reflecting films on glass and plastic

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