Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1753660
Reference31 articles.
1. Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
2. Sound velocity of AlxGa1−xN thin films obtained by surface acoustic-wave measurements
3. Aluminum nitride on silicon surface acoustic wave devices
4. The characterization of sputtered polycrystalline aluminum nitride on silicon by surface acoustic wave measurements
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