Effects of hydrogen atoms on the network structure of hydrogenated amorphous and microcrystalline silicon thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102736
Reference9 articles.
1. Electrical and Structural Properties of Phosphorous-Doped Glow-Discharge Si:F:H and Si:H Films
2. Low‐temperature crystallization of dopeda‐Si:H alloys
3. Mechanisms of Plasma Induced Silicon Deposition and the Control of the Properties of the Deposit
4. Transition from Amorphous to Crystalline Silicon: Effect of Hydrogen on Film Growth
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3. Effect of Bias Applied to the Substrate on the Low Temperature Growth of Silicon Epitaxial Films during RF-PECVD;Crystal Growth & Design;2018-08-20
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