Low‐Energy‐Ion‐Bombardment Damage in Germanium
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1703161
Reference27 articles.
1. Depths of Low‐Energy Ion Bombardment Damage in Germanium
2. Controlled Sputtering of Metals by Low-Energy Hg Ions
3. Atom Ejection Patterns in Single‐Crystal Sputtering
4. Atom Ejection in Low Energy Sputtering of Single Crystals of bcc Metals
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2. An attempt to understand the sputtering yield enhancement due to implantation of inert gases in amorphous solids;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1984-03
3. A high resolution EELS study of free-carrier variations in H+2/H+ bombarded (100)GaAs;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1984
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