(Invited) Challenges for Etch Technology and the Integration of New Channel Materials Beyond 7 nm
-
Published:2017-04-27
Issue:6
Volume:77
Page:67-73
-
ISSN:1938-6737
-
Container-title:ECS Transactions
-
language:en
-
Short-container-title:ECS Trans.
Author:
Ranjan Alok,
Rastogi VinayakORCID,
Ventzek Peter
Publisher
The Electrochemical Society