Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1149871
Reference8 articles.
1. Investigation of microstrip and coplanar transmission lines on lossy silicon substrates without backside metallization
2. Open- and short-circuit terminated series stubs in finite-width coplanar waveguide on silicon
3. Novel coplanar waveguide to slotline transition on high resistivity silicon
4. Determination of Loaded, Unloaded, and External Quality Factors of a Dielectric Resonator Coupled to a Microstrip Line
5. Super-resolution Aperture Scanning Microscope
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