Atomistic-to-continuum description of vacancy cluster properties in crystalline silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1461050
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1. Silicon crystals for future requirements of 300mm wafers
2. Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits
3. Modeling Microdefect Formation in Czochralski Silicon
4. Environment-dependent interatomic potential for bulk silicon
5. Structural and binding properties of vacancy clusters in silicon
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