Author:
Dornberger E,Virbulis J,Hanna B,Hoelzl R,Daub E,von Ammon W
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference21 articles.
1. W. von Ammon, In: M. Umeno (Ed.), Proceedings of the Second International Symposium on Advanced Science and Technology of Silicon Materials, The 145th Committee on Processing and Characterization of Crystals 1996, p. 233.
2. Challenges for economical growth of high quality 300 mm CZ Si crystals
3. DRAM Wafer Qualification Issues: Oxide Integrity vs. D-Defects, Oxygen Precipitates and High Temperature Annealing
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