Design concept and performance considerations for fast high power semiconductor switching for high repetition rate and high power excimer laser-Reference-Cited by-同舟云学术

Design concept and performance considerations for fast high power semiconductor switching for high repetition rate and high power excimer laser

Published:1997-07 Issue:7 Volume:68 Page:2658-2665
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Goto Tatsumi,Kakizaki Kouji,Takagi Shigeyuki,Satoh Saburoh,Shinohe Takashi,Ohashi Hiromichi,Endo Fumihiko,Okamura Katsuya,Ishii Akira,Teranishi Tsuneharu,Yasuoka Koichi

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1148176

Reference17 articles.

1. Laser‐cleaning techniques for removal of surface particulates

2. Laser-chemical processing: recent developments

3. 2-kHz repetition rate XeF laser

4. 200 W KrF gas transport laser

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