Development of key components and technologies for a high repetition rate and high-power excimer laser-Reference-Cited by-同舟云学术

Development of key components and technologies for a high repetition rate and high-power excimer laser

Published:1998-01 Issue:1 Volume:69 Page:1-9
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Goto Tatsumi,Takagi Shigeyuki,Kakizaki Kouji,Saton Saburoh,Kosugi Shinichiro,Ohishi Takashi,Kanazawa Yukio,Ishii Akira,Teranishi Tsuneharu,Yasuoka Koichi,Shinohe Takashi,Ohashi Hiromichi,Endo Fumihiko,Okamura Katsuya

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1148471

Reference27 articles.

1. 2-kHz repetition rate XeF laser

2. 200 W KrF gas transport laser

3. Increase in the repetition frequency of XeCl laser pulses to 1 kHz

4. EUREKA's excimers

5. Design and characteristics of high pulse repetition rate and high average power excimer laser systems

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