Sputtering and Strain of Silicon by Ion Implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1659630
Reference6 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Sputtering Experiments with 1‐ to 5‐keV Ar+ Ions
3. X-Ray Investigation of Lattice Deformations in Silicon Induced through High-Energy Ion Implantation
4. LATTICE EXPANSION AND STRAIN IN ION‐BOMBARDED GaAs AND SI
5. Sputtering and depth-distribution phenomena in KCl, Al2O3, and TiO2
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