Study on low-energy sputtering near the threshold energy by molecular dynamics simulations
Author:
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4738951
Reference40 articles.
1. Energetic condensation: Processes, properties, and products
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
3. Sputtering by ion bombardment theoretical concepts
4. Some useful yield estimates for ion beam sputtering and ion plating at low bombarding energies
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