Nanofabrication of diffractive elements for soft x-ray and extreme ultraviolet applications using ion beam lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3258655
Reference9 articles.
1. Soft X-Rays and Extreme Ultraviolet Radiation
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4. Soft X-ray microscopy at a spatial resolution better than 15 nm
5. Soft X-ray imaging zone plates with large zone numbers for microscopic and spectroscopic applications
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1. Full-visible achromatic imaging with a single dual-pinhole-coded diffractive photon sieve;Optics Express;2021-08-20
2. Nanofabrication and characterization of high-line-density x-ray transmission gratings;Journal of Micro/Nanolithography, MEMS, and MOEMS;2017-08-19
3. Higher-order diffraction suppression of free-standing quasiperiodic nanohole arrays in the x-ray region;Applied Physics Letters;2017-01-23
4. Fabrication of x-ray diffractive optical elements for laser fusion applications;Optical Engineering;2013-03-05
5. Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength;Optics Letters;2012-12-07
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