Author:
Csepregi L.,Iberl F.,Eichinger P.
Subject
Physics and Astronomy (miscellaneous)
Cited by
16 articles.
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1. Ion Beam Lithography Using Membrane Masks;Japanese Journal of Applied Physics;2002-06-30
2. A review of ion projection lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-05
3. Pattern Generation;The Physics of Micro/Nano-Fabrication;1992
4. The application of channeling to masked ion beam lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-05
5. Ion Lithography and Focused Ion Beam Implantation;Handbook of Vlsi Microlithography;1991