Electron scattering at interfaces in nano-scale vertical interconnects: A combined experimental and ab initio study-Reference-Cited by-同舟云学术

Electron scattering at interfaces in nano-scale vertical interconnects: A combined experimental and ab initio study

Published:2018-04-16 Issue:16 Volume:112 Page:163107
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Lanzillo Nicholas A.¹,Restrepo Oscar D.²,Bhosale Prasad S.¹,Cruz-Silva Eduardo²,Yang Chih-Chao¹,Youp Kim Byoung²,Spooner Terry¹,Standaert Theodorus¹,Child Craig²,Bonilla Griselda¹³,Murali Kota V. R. M.²

Affiliation:

1. IBM Research, Albany Nanotech, 257 Fuller Road, Albany, New York 12203, USA

2. GLOBALFOUNDRIES, 400 Stone Break Road Extension, Malta, New York 12020, USA

3. IBM T.J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA

Funder

International Business Machines Corporation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5027096

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