A model for pressurized hydrogen induced thin film blisters-Reference-Cited by-同舟云学术

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A model for pressurized hydrogen induced thin film blisters

Published:2016-12-21 Issue:23 Volume:120 Page:235304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

van den Bos R. A. J. M.¹,Reshetniak V.²^ORCID,Lee C. J.¹^ORCID,Benschop J.¹³,Bijkerk F.¹

Affiliation:

1. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

2. Institute for Spectroscopy Russian Academy of Sciences (ISAN), Troitsk, Moscow, Russian Federation

3. ASML Netherlands B.V., Veldhoven, The Netherlands

Funder

ASML

Nederlandse Organisatie voor Wetenschappelijk Onderzoek (NWO)

Carl-Zeiss-Stiftung (Carl Zeiss Stiftung)

Agentschap NL (NL Agency)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4972221

Reference35 articles.

1. Stability of extreme ultraviolet multilayer coatings to low energy proton bombardment

2. Stress characteristics in EUV mask Mo/Si multilayers deposited by ion beam sputtering

3. Cleaning technology for EUV multilayer mirror using atomic hydrogen generated with hot wire

4. Electronegativity-dependent tin etching from thin films

5. Ion effects in hydrogen-induced blistering of Mo/Si multilayers

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1. First principles study on strain effect of hydrogen diffusion and dissolution behavior in Ruthenium;International Journal of Hydrogen Energy;2024-01

2. Insights into thin film blistering of gold coating on metal substrate;Applied Surface Science;2023-02

3. Blister growth model in proton-irradiated metals - application to tungsten irradiated by MeV protons;Journal of Nuclear Materials;2022-06

4. Evaluation of Hydrogen-Induced Blistering of Mo/Si Multilayers with a Capping Layer;Plasma and Fusion Research;2022-02-21

5. Mirrors for Space Telescopes: Degradation Issues;Applied Sciences;2020-10-26

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