Plasmonic nanoparticle lithography: Fast resist-free laser technique for large-scale sub-50 nm hole array fabrication
Author:
Affiliation:
1. Data Storage Institute, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-01, Innovis 138634, Singapore
Funder
Data Storage Institute
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5025096
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1. ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW
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