GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers
Author:
Affiliation:
1. Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, #08-02, Innovis, Singapore 138634
Funder
Agency for Science, Technology and Research (A*STAR)
Institute of Microelectronics (IME)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4955410
Reference19 articles.
1. MEMS technology for timing and frequency control
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3. Thin film Lamb wave resonators in frequency control and sensing applications: a review
4. Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications
5. J. Wang , J. E. Butler , T. Feygelson , and C. T.C. Nguyen , inProceedings of the IEEE MEMS'04, 25–29 January2004, pp. 641–644.
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