Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications-Reference-Cited by-同舟云学术

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Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications

Published:2015-02-12 Issue:3 Volume:25 Page:035016
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Liang Ji,Zhang Hongxiang,Zhang Daihua,Duan Xuexin,Zhang Hao,Pang Wei

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/25/i=3/a=035016/pdf

Reference24 articles.

1. Lamb wave resonant pressure micro-sensor utilizing a thin-film aluminium nitride membrane

2. Super-high-frequency two-port AlN contour-mode resonators for RF applications

3. Guided acoustic wave resonators using an acoustic Bragg mirror

4. AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

5. In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators

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2. Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc0.095N-based S0 mode Lamb-wave resonators;Microelectronics Journal;2024-03

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4. Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator;Micromachines;2023-10-22

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