Author:
Chen Jiahe,Yang Deren,Ma Xiangyang,Wang Weiyan,Zeng Yuheng,Que Duanlin
Subject
General Physics and Astronomy
Reference28 articles.
1. On the Properties of the Intrinsic Point Defects in Silicon: A Perspective from Crystal Growth and Wafer Processing
2. Low‐Temperature Out‐Diffusion of Cu from Silicon Wafers
3. K. Kugimiga, S. Akiyama, and S. Nakamura, in Semiconductor Silicon 1981, edited by H. R. Huff, R. J. Kriegler, and Y. Takeishi (Electrochemical Society, Pennington, NJ, 1981), p. 294.
4. Defect engineering of Czochralski single-crystal silicon
5. Gettering mechanisms in silicon
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