An oblique shadow deposition technique for altering the profile of grating relief patterns on surfaces
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90873
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1. Generation of periodic surface corrugations
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4. Plasma reactor design for the selective etching of SiO2 on Si
5. RF Sputter-Etching by Fluoro-Chloro-Hydrocarbon Gases
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