Author:
Yaron Giora,Hess LaVerne D.
Subject
Physics and Astronomy (miscellaneous)
Cited by
9 articles.
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1. Gate oxide prepared by nanometre silicon wet oxidation at low temperature for Si/SiGe PMOSFET application;Semiconductor Science and Technology;2001-11-08
2. Oxidation;Polycrystalline Silicon for Integrated Circuits and Displays;1998
3. Oxidation;Polycrystalline Silicon for Integrated Circuit Applications;1988
4. Properties of Thermal Oxides Grown on Phosphorus In Situ Doped Polysilicon;Journal of The Electrochemical Society;1983-08-01
5. Laser Processing in Silicon Microelectronics Technology;IEEE Transactions on Components, Hybrids, and Manufacturing Technology;1982-03