Innovative surface acoustic wave sensor for accurate measurement of subatmospheric pressure
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2908038
Reference6 articles.
1. Stress-sensitivity mapping for surface acoustic waves on quartz
2. Temperature‐compensated surface‐acoustic‐wave devices with SiO2film overlays
3. Miniaturized Bulk and Surface Acoustic Wave Quartz Oscillators Used as Sensors
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