3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator-Reference-Cited by-同舟云学术

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Published:2021-06-01 Issue:3 Volume:21 Page:76-81
ISSN:1335-8871
Container-title:Measurement Science Review
language:en
Short-container-title:

Author:

Hu Baofa¹²,Li Zhiwei¹²,Wan Yuanjie³²,Zhou Peng¹²,Zhang Chunquan¹,San Haisheng¹³²

Affiliation:

1. Pen-Tung Sah Institute of Micro-Nano Science and Technology , Xiamen University , Xiamen 361005 , China

2. Shenzhen Research Institute of Xiamen University , Shenzhen 518000 , China

3. School of Electronic Science and Engineering , Xiamen University , Xiamen 361005 , China

Abstract

Abstract This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

Publisher

Walter de Gruyter GmbH

Subject

Instrumentation,Biomedical Engineering,Control and Systems Engineering

Link

https://www.sciendo.com/pdf/10.2478/msr-2021-0011

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