Controlling precise magnetic field configuration around electron cyclotron resonance zone for enhancing plasma parameters and beam current

Author:

Yano Keisuke,Kurisu Yosuke,Nozaki Dai,Kimura Daiju,Imai Youta,Kumakura Sho,Sato Fuminobu,Kato Yushi,Iida Toshiyuki

Publisher

AIP Publishing

Subject

Instrumentation

Reference9 articles.

1. A. Kitagawa, T. Fujita, M. Muramatsu, Y. Sakamoto, T. Sakuma, N. Sasaki, T. Sasano, W. Takasugi, S. Biri, and A. G. Drentje, in Proceedings of the 19th International Workshop on ECR Ion Sources (ECRIS'10), Grenoble, France, 23–26 August 2010, http://www.jacow.org, pp. 20–22.

2. Bio-Nano ECRIS: An electron cyclotron resonance ion source for new materials production

3. 11–13GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

4. Improvement of microwave feeding on a large bore ECRIS with permanent magnets by using coaxial semi-dipole antenna

5. Design of an advanced minimum B for electron cyclotron resonance multicharged ion sources

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