Note: Differential amplified high-resolution tilt angle measurement system
Author:
Affiliation:
1. The State Key Lab of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
Funder
National Science and Technology Major Project of China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4894527
Reference16 articles.
1. Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique
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3. Small angular displacement measurement based on an autocollimator and a common-path compensation principle
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5. Methods of calibrating prisms with faces that have no reflective coating, using a dynamic goniometer
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