Correction of eddy current errors in electron beam deflection
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1662838
Reference3 articles.
1. Electron Resists for Microcircuit and Mask Production
2. III. Magnetic screening by hollow circular cylinders
3. Optimum Geometry of Saddle Shaped Coils for Generating a Uniform Magnetic Field
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. New method to correct eddy current in magnetic focusing-deflection system;Microelectronic Engineering;2005-03
2. Improving the speed of scanning electron microscope deflection systems;Measurement Science and Technology;1999-10-11
3. A microwave eight-pole transmission line deflector for 100 keV electrons;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-11
4. Calibrated deflection system for electron beam testing;Microelectronic Engineering;1987-01
5. Eddy current compensation in toroidal deflection yokes;Journal of Applied Physics;1980-07
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