A microwave eight-pole transmission line deflector for 100 keV electrons
-
Published:1991-11
Issue:6
Volume:9
Page:2944
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:
-
Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering