Evolution of texture at growth of titanium nitride films prepared by photon and ion beam assisted deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118544
Reference14 articles.
1. Alignment of thin films by glancing angle ion bombardment during deposition
2. Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering
3. In‐plane aligned YBa2Cu3O7−xthin films deposited on polycrystalline metallic substrates
4. Photon and ion beam assisted deposition of titanium nitride
5. Implantation-induced texture
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