Structure, optical, and electrical properties of indium tin oxide thin films prepared by sputtering at room temperature and annealed in air or nitrogen
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2715539
Reference37 articles.
1. Early stages of ITO deposition on glass or polymer substrates
2. Room-temperature growth of crystalline indium tin oxide films on glass using low-energy oxygen-ion-beam assisted deposition
3. Highly conducting indium tin oxide films grown by ultraviolet-assisted pulsed laser deposition at low temperatures
4. Electron scattering mechanisms in indium-tin-oxide thin films: grain boundary and ionized impurity scattering
5. Temperature effect on structure and surface morphology of indium tin oxide films deposited by reactive ion-beam sputtering
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