Room-temperature growth of crystalline indium tin oxide films on glass using low-energy oxygen-ion-beam assisted deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1538335
Reference27 articles.
1. Transparent conductors—A status review
2. Polymeric anodes for improved polymer light-emitting diode performance
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5. Low temperature deposition of ITO thin films by ion beam sputtering
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1. Effects of hydrogen and SiO2 buffer layer insertion on electrical properties of low-resistive indium tin oxide films formed on polyethylene naphthalate films;Japanese Journal of Applied Physics;2022-10-01
2. Properties of Indium Tin Oxide Films Grown on Microtextured Glass Substrates;ACS Applied Electronic Materials;2021-11-30
3. Room temperature deposition of very thin and flexible crystalline ITO thin film using 3-D facing-magnetron sputtering plasma source;Vacuum;2021-11
4. Improved Electrical and Optical Properties of Ultra-Thin Tin Doped Indium Oxide (ITO) Thin Films by a 3-Dimensionally Confined Magnetron Sputtering Source;Science of Advanced Materials;2021-08-01
5. Structural and morphological properties of ITO thin films grown by magnetron sputtering;Journal of Theoretical and Applied Physics;2015-10-07
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