Self-consistent electrodynamics of large-area high-frequency capacitive plasma discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3489950
Reference24 articles.
1. Principles of Plasma Discharges and Materials Processing
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5. Effect of azimuthally asymmetric reactor components on a parallel plate capacitively coupled plasma
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