Novel electron‐beam lithography forinsitupatterning of GaAs using an oxidized surface thin layer as a resist
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.344945
Reference22 articles.
1. Laser fabricated GaAs waveguiding structures
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5. FIB-Assisted Cl 2 Gas Etching of GaAs
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4. In situ electron-beam lithography on GaAs substrates using a metal alkoxide resist;Applied Physics Letters;1999-03-29
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