Subject
Physics and Astronomy (miscellaneous)
Cited by
77 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Selective Atomic Layer Etching for Silicon Device Fabrication;2024 International Conference on Integrated Circuits, Communication, and Computing Systems (ICIC3S);2024-06-08
2. Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05
3. Pulsed laser induced atomic layer etching of silicon;Journal of Vacuum Science & Technology A;2023-03
4. Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales;International Journal of Extreme Manufacturing;2023-01-24
5. Effects of atomic layer etching on magnetic properties of CoFeB films: Reduction of Gilbert damping;Journal of Magnetism and Magnetic Materials;2022-12